|
LiNbO3 ( LN, Lithium Niobate ) for A-O
Devices
Crystal symmetry: 3m
Density: 4.628 g/cm3
Optical spectral range: 0.4 - 5 μm
Elastic constants cij (1011
dyn/cm2 or 1010
Pa):
| 0.03 |
0.079 |
0.104 |
-0.071 |
0 |
0 |
| 0.079 |
0.03 |
0.104 |
0.071 |
0 |
0 |
| 0.172 |
0.172 |
0.078 |
0 |
0 |
0 |
| -0.152 |
0.152 |
0 |
0.22 |
0 |
0 |
| 0 |
0 |
0 |
0 |
0.22 |
-0.152 |
| 0 |
0 |
0 |
0 |
-0.071 |
-0.025 |
Photoelastic constants pij:
| 0.03 |
0.079 |
0.104 |
-0.071 |
0 |
0 |
| 0.079 |
0.03 |
0.104 |
0.071 |
0 |
0 |
| 0.172 |
0.172 |
0.078 |
0 |
0 |
0 |
| -0.152 |
0.152 |
0 |
0.22 |
0 |
0 |
| 0 |
0 |
0 |
0 |
0.22 |
-0.152 |
| 0 |
0 |
0 |
0 |
-0.071 |
-0.025 |
Sound velocity:
|
Direction |
Polarization |
v (105
cm/s) |
|
[100] |
[100], L |
6.549 |
|
[010] |
[010], L |
6.838 |
|
[010] |
S |
4.4667 |
|
[001] |
[001], L |
7.331 |
|
[001] |
[100], S |
3.5885 |
|
[010] |
[100], S |
3.838 |
|
[001] |
[001], L |
7.271 |
|
[100] |
[001], S |
4.801 |
|
[100] |
[010], S |
4.0593 |
|
[010] |
[010], QL |
6.882 |
|
[010] |
[100], S |
3.962 |
|
[010] |
[001], QS |
4.494 |
|
[001] |
[001] L |
7.333 |
|
[001] |
[001] L |
7.22 |
|
[010] |
[010] L |
6.58 |
|
[100] |
[100] L |
6.57 |
|
[001] |
[010] S |
3.57 |
|
[001] |
[100] S |
3.57 |
|
[001] |
[001] L |
7.331 |
Standard LiNbO3 SAW Wafer
| Diameter: φ40.0mm, φ50.8mm, φ76.2mm , φ101.6mm |
| Thickness: 0.2~1.0mm
|
| Orientation: X, Y, Z, 127.86° Y, 64° Y, 135° Y |
| Front polish: 0.016 ~0.001μm
|
| Back lapping: 0.3 ~10μm
|
| Flatness: <15μm
|
| Bow:
<20μm for φ40 ~ 65 mm, <40μm for
φ65 ~101.6mm |
|